Precise, Scalable Robotics for a Rapidly Changing Industry
In the space of a generation, the semiconductor industry has evolved from a niche specialty to a fundamental driver of the global economy. Falling production costs, rapidly improving fabrication techniques and expanding markets all drive new opportunities for nimble manufacturers. At the same time, disruptive shifts in technology consumptions create challenges that demand forceful, cost-conscious responses. Today’s semiconductor wafer fabrication plants - or semiconductor fabs - require extensive automation and hands-off manufacturing capabilities from their equipment suppliers. Kawasaki’s high-performance specialized handling robots play an integral role in the automated manufacture of raw silicon wafers into integrated circuits and through extensive customer collaboration, we have become the leading supplier of integrated atmospheric robotics.
Outflank the Competition with Versatile, Adaptable Automation
Kawasaki Robotics’ industry-leading suite of compact, accurate, high-speed semiconductor robots enable manufacturers to automate silicon wafer transfer and logistics throughout the integrated circuit manufacturing process and meet today’s demanding throughput requirements. Our cleanroom ISO Class 1 robots can handle 300 mm and 450 mm wafers through the production space without damage or disruption, moving wafers from FOUPs (front opening unified pods) to process tool chambers. Kawasaki robots reduce error rates, boost quality and improve throughput.
With Kawasaki Robotics’ flexible automation solutions at their disposal, nimble semiconductor equipment manufacturers can expect to retain their competitive edge.
Applications
Manipulation du matériel
The process of moving materials, parts, and products from one place to another, material handling is performed in almost all industries, not just in the manufacturing industry.
For material handling, industrial robots are most commonly used for various purposes, including high-speed transport of small parts and handling of heavy objects that humans cannot carry.
Machines spé
A critical process in the machinery industry, machine tending involves loading parts into NC machine tools and unloading them after their machining is complete. Loading and unloading processing materials into and out of forging and press machines are also classified as machine tending.
Manipulation des tranches de silicium
Wafer transfer is the handling of wafers in the front-end process of semiconductor manufacturing equipment.
This process uses clean robots and requires high-precision, high-speed and smooth movement.