TTJ20

  • Maximale Reichweite1067.2 mm
  • MountingBoden
  • SerieTTJ-Serie

High-speed transfer in high and low pass-lines, thanks to a unique high rigidity telescopic mechanism.

・Double hand
・Zaxis Motion range:0~470 ㎜
・Hand type:grip edge hand/vacuum hand
・Wafer size support: 8 inches, 12 inches
・No. of FOUPs:3

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