Wafer transfer robots

Kawasaki’s wafer transfer robots boast the world’s largest share.
They are compliant with the SEMI-F47 and SEMI-S2 standards and can access 3 to 4 FOUPS without a track.

NTJ series

Original drive mechanism provides highly accurate and smooth operations.

NTJ10

NTJ10

  • Payload
  • Max. Reach 1067.2mm
  • Applications
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NTJ series
NTJ20

NTJ20

  • Payload
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NTJ series

TTJ series

High-speed transfer in high and low pass-lines, thanks to a unique highrigidity telescopic mechanism.

TTJ10

TTJ10

  • Payload
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series TTJ series
TTJ20

TTJ20

  • Payload
  • Max. Reach 1067.2mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series TTJ series

NTH series

The long arm that is offset from the center of the base can access 4FOUP without a track.

NTH20

NTH20

  • Payload
  • Max. Reach 1226.6mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NTH series

NX series

Installation in a small space is possible, thanks to its compact arm construction.

NX420

NX420

  • Payload
  • Max. Reach 736mm
  • Applications Silicon Wafer Handling
  • Robot Category Wafer transfer robots
  • Mounting Floor
  • Series NX series