Kawasaki’s wafer transfer robots boast the world’s largest share.
They are compliant with the SEMI-F47 and SEMI-S2 standards and can access 3 to 4 FOUPS without a track.
NTS series
■ Accessible to 2 and 3 FOUP FEM.
■ Smooth and accurate operations thanks to original driving mechanism.
■ Compliant with SEMI-F47 and S2 standards.

NTS10
- Maximale Nutzlast —
- Maximale Reichweite 1066mm
- Anwendungen Wafertransfer
- Kategorien Wafer-Transportroboter
- Mounting Boden
- Series NTS-Serie

NTS20
- Maximale Nutzlast —
- Maximale Reichweite 1066mm
- Anwendungen Wafertransfer
- Kategorien Wafer-Transportroboter
- Mounting Boden
- Series NTS-Serie
TTS series
■ Unique telescopic mechanism to cover high and low positions.
■ Compliant with SEMI-F47 and S-2 standards.

TTS10
- Maximale Nutzlast —
- Maximale Reichweite 1066mm
- Anwendungen Wafertransfer
- Kategorien Wafer-Transportroboter
- Mounting Boden
- Series TTS-Serie

TTS20
- Maximale Nutzlast —
- Maximale Reichweite 1066mm
- Anwendungen Wafertransfer
- Kategorien Wafer-Transportroboter
- Mounting Boden
- Series TTS-Serie