Wafer transfer robots

Kawasaki’s wafer transfer robots boast the world’s largest share.
They are compliant with the SEMI-F47 and SEMI-S2 standards and can access 3 to 4 FOUPS without a track.

NTS series

■ Accessible to 2 and 3 FOUP FEM.
■ Smooth and accurate operations thanks to original driving mechanism.
■ Compliant with SEMI-F47 and S2 standards.

TTS series

■ Unique telescopic mechanism to cover high and low positions.
■ Compliant with SEMI-F47 and S-2 standards.