Kawasaki has the No.1 market share in the wafer transfer clean robots.
The original drive mechanism provides highly accurate and rigid operations.
A single robot can access 2, 3 and 4FOUPs of EFEM without a track.
Compatible with SEMI-F47 and SEMI-S2 standards.
Transfers of ring frames and substrates are possible.
＊ Contact Kawasaki representative for details.
NTJ series
■Original drive mechanism provides highly accurate and smooth operations.
NTJ20
- Payload —
- Max. Reach 1067.2mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series NTJ series
NTJ10
- Payload —
- Max. Reach 1067.2mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series NTJ series
TTJ series
■ High-speed transfer in high and low pass-lines, thanks to a unique highrigidity telescopic mechanism.
TTJ10
- Payload —
- Max. Reach 1067.2mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series TTJ series
TTJ20
- Payload —
- Max. Reach 1067.2mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series TTJ series
NTH series
■The long arm that is offset from the center of the base can access 4FOUP without a track.
NTH20
- Payload —
- Max. Reach 1226.6mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series NTH series
NX series
■ Installation in a small space is possible, thanks to its compact arm construction.
NX420
- Payload —
- Max. Reach 736mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series NX series