晶圓傳送機器人

Kawasaki has the No.1 market share in the wafer transfer clean robots.
The original drive mechanism provides highly accurate and rigid operations.
A single robot can access 2, 3 and 4FOUPs of EFEM without a track.
Compatible with SEMI-F47 and SEMI-S2 standards.
Transfers of ring frames and substrates are possible.
＊ Contact Kawasaki representative for details.

NTJ series

■Original drive mechanism provides highly accurate and smooth operations.

TTJ series

■ High-speed transfer in high and low pass-lines, thanks to a unique highrigidity telescopic mechanism.

NTH series

■The long arm that is offset from the center of the base can access 4FOUP without a track.

NX series

■ Installation in a small space is possible, thanks to its compact arm construction.