Kawasaki’s wafer transfer robots boast the world’s largest share.
They are compliant with the SEMI-F47 and SEMI-S2 standards and can access 3 to 4 FOUPS without a track.
NTJ series
Original drive mechanism provides highly accurate and smooth operations.
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NTJ10
- Payload —
- Max. Reach 1067.2mm
- Applications —
- Robot Category Wafer transfer robots
- Mounting Floor
- Series NTJ series
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NTJ20
- Payload —
- Max. Reach 1067.2mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series NTJ series
TTJ series
High-speed transfer in high and low pass-lines, thanks to a unique highrigidity telescopic mechanism.
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TTJ10
- Payload —
- Max. Reach 1067.2mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series TTJ series
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TTJ20
- Payload —
- Max. Reach 1067.2mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series TTJ series
NTH series
The long arm that is offset from the center of the base can access 4FOUP without a track.
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NTH20
- Payload —
- Max. Reach 1226.6mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series NTH series
NX series
Installation in a small space is possible, thanks to its compact arm construction.
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NX420
- Payload —
- Max. Reach 736mm
- Applications Silicon Wafer Handling
- Robot Category Wafer transfer robots
- Mounting Floor
- Series NX series