Wafer Transfer Robots

Kawasaki offers a full line of industry-leading semiconductor and electronics handling robots. These robots are built for use in cleanroom applications, including ISO Class 1. Speed, accuracy, and reach make these robots ideal for handling delicate semiconductor wafers, LCD panels, organic EL, and solar panels. They are compliant with the SEMI-F47 and SEMI-S2 standards and can access 3 to 4 FOUPS without a track.

NTS series

■ Accessible to 2 and 3 FOUP FEM
■ Unique driving mechanism yields smooth and accurate movements
■ Compliant with SEMI-F47 and S2 standards

TTS series

■ Unique telescopic mechanism to cover high and low positions.
■ Compliant with SEMI-F47 and S-2 standards.